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 thin films were deposited by thermal evaporation method with evaporated obliquely incident deposition technique also known as glancing angle deposition (GLAD) technique. X-ray diffraction (XRD), atomic force microscopy (AFM), and UV-Vis-NIR spectra were used to characterize the structural, surface morphology, and optical properties of the deposited  thin films. The surface roughness of GLAD  films for the different flux incident angles was studied by two methods AFM and spectrophotometric analysis, which show an increase of surface roughness with increasing of the incident angle. The relationship among the refractive index, packing density, birefringence, and flux incident angle was discussed. We show that the refractive index and the packing density decreased with increasing of the incident angle. The maximum of birefringence (Dn) is up to 0.316 at q = 70°. The influence of different incident flux angles on the microstructure and optical properties was explored in detail.  

glancing angle deposition,  thin films, surface morphology, packing density, anisotropy, birefringence.